• [1]

    Griffiths S K, Hruby J M, Ting T. J. Micromech.Microeng., 1999, 9:3532 Guckel H, Christenson T R, Klein J et al. Proc. 7th Int. Symp. On Microsystems, Intelligent Materials and Robots, 1996, p213 CHENG Y, Shew B Y, Lin C Y et al. J. Micromech. Microeng, 1999, 9:584 YI F, JIN M, TANG E et al. Microsystem Technologies, 1996, 3:75 PENG Liang-Qiang, YI Fu-Ting, ZHANG )u-Fang et al. Micro/Nano Science and Technology, 2000, 5:51 (in Chinese)(彭良强，伊福廷，张菊芳等.微米/纳米科学与技术, 2000,5:51)