Local structure of oxygen-deficient Yttrium oxide

CHENG Xue-Rui; DAI Hai-Yang; QI Ze-Ming; WANG Yu-Yin; ZHANG Guo-Bin

doi:10.1088/1674-1137/37/9/098002

Chinese Physics C> 2013, Vol. 37> Issue(9) : 098002 DOI: 10.1088/1674-1137/37/9/098002

Local structure of oxygen-deficient Yttrium oxide

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Abstract：
Yttrium oxide thin films have been deposited on Si (100) substrate by using pulsed laser deposition (PLD) method. X-ray diffraction (XRD), hard and soft X-ray absorption spectroscopy (XAFS) are employed to investigate the origin of oxygen vacancies and their influence on the structure and atomic distributions. The XRD results indicate that the Y₂O₃ thin films strongly orient the (111) axis of the cubic structure. Analyses on the Y K-edge extended X-ray absorption fine structures reveal that the coordination number of Y atoms decreases and the bond length of Y-O contracts due to the loss of oxygen atoms. The X-ray absorption near edge structure analysis together with a theoretical approach further confirms the oxygen vacancies formation and their possible location.

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CHENG Xue-Rui, DAI Hai-Yang, QI Ze-Ming, WANG Yu-Yin and ZHANG Guo-Bin. Local structure of oxygen-deficient Yttrium oxide[J]. Chinese Physics C, 2013, 37(9): 098002. doi: 10.1088/1674-1137/37/9/098002

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Received: 2012-10-23
Revised: 2012-11-26

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Local structure of oxygen-deficient Yttrium oxide

Corresponding author: QI Ze-Ming,

Received Date: 2012-10-23

Accepted Date: 2012-11-26

Available Online: 2013-09-05

Abstract: Yttrium oxide thin films have been deposited on Si (100) substrate by using pulsed laser deposition (PLD) method. X-ray diffraction (XRD), hard and soft X-ray absorption spectroscopy (XAFS) are employed to investigate the origin of oxygen vacancies and their influence on the structure and atomic distributions. The XRD results indicate that the Y₂O₃ thin films strongly orient the (111) axis of the cubic structure. Analyses on the Y K-edge extended X-ray absorption fine structures reveal that the coordination number of Y atoms decreases and the bond length of Y-O contracts due to the loss of oxygen atoms. The X-ray absorption near edge structure analysis together with a theoretical approach further confirms the oxygen vacancies formation and their possible location.

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Local structure of oxygen-deficient Yttrium oxide

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