Study of Extraction Property of RF Ion Source

SUN Zhen-Wu; HUO Yu-Ping; LI Yu-Xiao; LI Tao

Chinese Physics C> 2006, Vol. 30> Issue(9) : 902-906

Study of Extraction Property of RF Ion Source

School of Physics Engineering, Zhengzhou University, Zhengzhou 450052, China

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Abstract：
Effects of geometry parameters of extraction electrode, extraction voltage and oscillator power on the extraction property of RF ion source are measured and the experimental results are analyzed. It turns out that the RF ion source has a good extraction property. There is the best D/d on condition that other parameters don't change. The D/d rising is beneficial to the ion beam focusing from over focusing. Focusing degree increases and extraction beam intensity drops with b/D increasing. Focusing degree rises with B/d decreasing and the rising tendency slows down when B/d is smaller than 4. The suitable ranges of D/d, b/D and B/d are respectively 1.6—2.1,0.7—1.1 and 4—7 when considering comprehensively the focusing degree, the extraction beam intensity and the pressure. Change of extraction voltage and oscillator power has opposite effect on the ion source performance and they have respectively best operation values.

References

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SUN Zhen-Wu, HUO Yu-Ping, LI Yu-Xiao and LI Tao. Study of Extraction Property of RF Ion Source[J]. Chinese Physics C, 2006, 30(9): 902-906.

SUN Zhen-Wu, HUO Yu-Ping, LI Yu-Xiao and LI Tao. Study of Extraction Property of RF Ion Source[J]. Chinese Physics C, 2006, 30(9): 902-906. shu

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Received: 2006-01-24
Revised: 2006-03-27

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通讯作者: 陈斌, bchen63@163.com

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沈阳化工大学材料科学与工程学院沈阳 110142

Study of Extraction Property of RF Ion Source

Corresponding author: SUN Zhen-Wu,

School of Physics Engineering, Zhengzhou University, Zhengzhou 450052, China

Received Date: 2006-01-24

Accepted Date: 2006-03-27

Available Online: 2006-09-05

Abstract: Effects of geometry parameters of extraction electrode, extraction voltage and oscillator power on the extraction property of RF ion source are measured and the experimental results are analyzed. It turns out that the RF ion source has a good extraction property. There is the best D/d on condition that other parameters don't change. The D/d rising is beneficial to the ion beam focusing from over focusing. Focusing degree increases and extraction beam intensity drops with b/D increasing. Focusing degree rises with B/d decreasing and the rising tendency slows down when B/d is smaller than 4. The suitable ranges of D/d, b/D and B/d are respectively 1.6—2.1,0.7—1.1 and 4—7 when considering comprehensively the focusing degree, the extraction beam intensity and the pressure. Change of extraction voltage and oscillator power has opposite effect on the ion source performance and they have respectively best operation values.

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Study of Extraction Property of RF Ion Source

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