Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources

D.Hitz

Chinese Physics C> 2007, Vol. 31> Issue(S1) : 123-127

Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources

D.Hitz ^,

Commissariat a l'Energie Atomique, Departement de Recherche Fondamentale sur la Matiere Condensee,Service des Basses Temperatures, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France

Abstract
HTML
Reference
Related

PDF

Abstract：
As they are first optimized for their ion losses, ECRISs are always under a fundamental compromise: having high losses and strong confinement at the same time. To help ECR ion source developers in the design or improvement of existing machines, general comments are presented in a review article being soon published. In this 160 pages contribution, fundamental aspects of ECRISs are presented, with a discussion of electron temperature and confinement and ion confinement. Then, as microwaves play a key role in these machines, a chapter presents major guidelines for microwave launching and coupling to ECR plasma. Moreover, once ECR plasma is created, understanding this plasma is important in ion sourcery; and a section is dedicated to plasma diagnostics with an emphasis on the determination of electron and ion density and temperature by vacuum ultraviolet (VUV) spectroscopy. Another chapter deals with the role of magnetic confinement and presents updated scaling laws. Next chapter presents different types of ECRISs designed according to the main parameters previously described. Finally, some industrial applications of ECRISs and ECR plasmas in general are presented like ion implantation and photon lithography. Some hints taken from this review article are presented in the following article.

References

[1]

. Apard P, Bliman S, Geller R et al. Physics Letters, 1973,A44: 432-4342. Bliman S, Dousson S, Fremion L et al. Nucl. Instrum. Methods, 1978, 148: 213-2163. Hitz D, Delaunay M, Girard A et al. An All-Permanent Magnet ECR Ion Source for the ORNL MIRF Upgrade Project. Proceedings of the 16th ECRIS Workshop, AIP Conference Proceedings, 2005, 49: 123-1264. Melin G, Nguyen T K, Farchi A. RF Waves and RF Coupling Systems in ECR Ion Source. Proceedings of 12th ECRIS Workshop, 1995. 105-1095. ZHAO H W, SUN L T, ZHANG X Z et al. Rev. Sci. Instrum., 2006, 77: 03A3336. Lyneis C M, Leitner D, Abbott S R et al. Rev. Sci. Instrum., 2004, 75: 1389-13937. Hitz D, Cormier D, Mathonnet J M et al. Grenoble Test Source (GTS): a Multipurpose Room Temperature ECRIS. Proceedings of the 15th ECRIS Workshop, 2002. 53-558. Hitz D, Delaunay M, Quesnel E et al. All-Permanent Magnet ECR Plasma for EUV Light. 3rd International Symposium on EUV Light, Miyazaki, Japan (2004)9. Hitz D, Cormier D. Device for Controlling the Electronic Temperature in an ECR Plasma. Patent #WO2005/04629610. Delaunay M, Hitz D. Photon Source Comprising an Electron Cyclotron Resonance Multicharged Ion Plasma Source. Patent #FR055072411. Hitz D, Delaunay M. Photon Source Comprising an ECR Source with Pressure Gradient, Patent # FR055125612. Hitz D, Delaunay M, Vannu el C et al. Photon Source Comprising an ECR Source Equipped with Mirrors. Patent# FR0503421

[1]	HAO Jian-Kui , ZHAO Kui . Recent Progress on RF Superconductivity and ERL. Chinese Physics C, 2008, 32(S1): 200-203.
[2]	G.Ciavola¹ , S.Gammino¹ , L.Celona¹ , F.Consoli¹ , G.Gallo¹ , D.Mascali¹ , S.Passarello¹ , M.Cavenago² , A.Galatà² , P.Spaedtke³ , K.Tinschert³ , R.Lang³ , H.Koivisto⁴ , P.Suomin . Status Report of the MS-ECRIS Construction. Chinese Physics C, 2007, 31(S1): 13-17.
[3]	D.Leitner , D.S.Todd , M.L.Galloway , C.M.Lyneis . Recent 28GHz Results with VENUS. Chinese Physics C, 2007, 31(S1): 1-7.
[4]	C.Bieth¹ , J.L.Delvaux² , F.Varenne³ , M.Duval³ , M.P.Bourgarel¹ , J.Fermé¹ . Studies and Design of a Dual Beam Axial Injection System Using H- Cusp Source and ECR Ion Source for He for IBA C70 Cyclotron. Chinese Physics C, 2007, 31(S1): 223-225.
[5]	G.D.Alton¹ , Y.Kawai² , Y.Liu¹ , O.Tarvainen³ , P.Suominen³ , H.Koivisto³ . Enhancing the Performances of Conventional B-Geometry ECR Ion Sources with Broadband Microwave Radiation. Chinese Physics C, 2007, 31(S1): 128-132.
[6]	E.Galutschek¹ , E.Salzborn² , F.Aumayr¹ , HP.Winter¹ . Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source. Chinese Physics C, 2007, 31(S1): 66-69.
[7]	S.Golubev , A.Bokhanov , I.Izotov , S.Razin , A.Sidorov , V.Skalyga , A.Vodopyanov , V.Zorin . Gasdynamic ECR Sources of Multichared Ions (abstract only). Chinese Physics C, 2007, 31(S1): 238-238.
[8]	J.Ohnishi , T.Nakagawa , Y.Higurashi , M.Kidera , H.Saito , A.Goto . Design of Magnet System for RIKEN Superconducting ECR Ion Source. Chinese Physics C, 2007, 31(S1): 37-40.
[9]	Y.Liu¹ , Y.Kawai² , G.D.Alton¹ . Recent Results with the 6 GHz Flat-B ECR Ion Source at ORNL-HRIBF. Chinese Physics C, 2007, 31(S1): 80-84.
[10]	V.V.Bekhterev¹ , S.L.Bogomolov¹ , V.I.Datskov² , V.M.Drobin² , S.N.Dmitriev¹ , A.A.Efremov¹ , V.N.Loginov¹ , A.N.Lebedev¹ , H.Malinowski³ , V.V.Seleznev² , A.Shishov² , G.P.Tsvineva² . The Project of the Superconducting ECR Ion Source DECRIS-SC2. Chinese Physics C, 2007, 31(S1): 23-26.
[11]	R.Vondrasek , R.Scott , R.Pardo , . Solid Material Development with the Argonne National Laboratory ECR Ion Sources. Chinese Physics C, 2007, 31(S1): 101-104.
[12]	M.Marie-Jeanne¹ , 2 , 3 , P.Delahaye¹ . Recent Developments on the Phoenix ECR Booster at ISOLDE, CERN. Chinese Physics C, 2007, 31(S1): 216-218.
[13]	SUN Liang-Ting , CAO Yun , ZHAO Hong-Wei , ZHANG Zi-Min , FENG Yu-Cheng , LI Jin-Yu . Study of the Ion Beam Extraction and Transmission from ECRIS. Chinese Physics C, 2005, 29(8): 810-817.
[14]	SUN Liang-Ting , ZHAO Hong-Wei . Study on Designing of Hexapole Magnet of ECR Ion Source. Chinese Physics C, 2004, 28(6): 644-649.
[15]	XIE Ya-Ning , LUO Jun , TAO Ye , ZHANG Jing , HU Tian-Dou . New Development of XAFS Experimental Methods at BSRF. Chinese Physics C, 2001, 25(S1): 7-11.
[16]	Peng Hongan , Xu Jiasheng . New Progresses in Deep Inelastic Scattering in Small x Region. Chinese Physics C, 1999, 23(2): 142-150.
[17]	Zhao Hongwei , Liu Zhanwen , Zhang Xuezhen , Guo Xiaohong , Gao Jiyuan , Zhang Zimin , Yuan Ping , Zhang Wen , Lei Hailiang , Cao Yun , Feng Yucheng , Li Jinyu , Wang Hui , Ma Baohua , Wang Yifang , Wei Baowen . A 14.5GHz New ECR Ion Source With High Charge State and High Magnetic Field. Chinese Physics C, 1999, 23(7): 717-722.
[18]	Zhao Yubin , Liu Zhanwei , Zhao Hongwei , Ding Junzhang , Cao Yun , Zhang Zimin , Zhang Xuezhen , Guo Xiaohong . A Single Charge State ECR Ion Source. Chinese Physics C, 1999, 23(11): 1125-1128.
[19]	XU Yong-Xing , LIU Zhan-Wen , WEI Bao-Wen . Design Calculation of a Improved ECR Ion Source. Chinese Physics C, 1991, 15(4): 343-348.
[20]	MA MING-HSIU , YAO WEI , EAI KUEI-PEING . A NEW TYPE OF RADIOFREQUENCY METAL ION SOURCE. Chinese Physics C, 1978, 2(6): 544-549.

Access

Get Citation

D.Hitz. Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources[J]. Chinese Physics C, 2007, 31(S1): 123-127.

D.Hitz. Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources[J]. Chinese Physics C, 2007, 31(S1): 123-127. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2007-05-30
Revised: 1900-01-01

Article Metric

Article Views(2963)
PDF Downloads(720)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources

Corresponding author: D.Hitz,

Commissariat a l'Energie Atomique, Departement de Recherche Fondamentale sur la Matiere Condensee,Service des Basses Temperatures, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France

Received Date: 2007-05-30

Accepted Date: 1900-01-01

Available Online: 2007-01-03

Abstract: As they are first optimized for their ion losses, ECRISs are always under a fundamental compromise: having high losses and strong confinement at the same time. To help ECR ion source developers in the design or improvement of existing machines, general comments are presented in a review article being soon published. In this 160 pages contribution, fundamental aspects of ECRISs are presented, with a discussion of electron temperature and confinement and ion confinement. Then, as microwaves play a key role in these machines, a chapter presents major guidelines for microwave launching and coupling to ECR plasma. Moreover, once ECR plasma is created, understanding this plasma is important in ion sourcery; and a section is dedicated to plasma diagnostics with an emphasis on the determination of electron and ion density and temperature by vacuum ultraviolet (VUV) spectroscopy. Another chapter deals with the role of magnetic confinement and presents updated scaling laws. Next chapter presents different types of ECRISs designed according to the main parameters previously described. Finally, some industrial applications of ECRISs and ECR plasmas in general are presented like ion implantation and photon lithography. Some hints taken from this review article are presented in the following article.

HTML

Reference (1)

Recent Progress in High Frequency Electron Cyclotron Resonance Ion Sources

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article