Study of Extraction Property of RF Ion Source

SUN Zhen-Wu; HUO Yu-Ping; LI Yu-Xiao; LI Tao

Chinese Physics C> 2006, Vol. 30> Issue(9) : 902-906

Study of Extraction Property of RF Ion Source

School of Physics Engineering, Zhengzhou University, Zhengzhou 450052, China

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Abstract：
Effects of geometry parameters of extraction electrode, extraction voltage and oscillator power on the extraction property of RF ion source are measured and the experimental results are analyzed. It turns out that the RF ion source has a good extraction property. There is the best D/d on condition that other parameters don't change. The D/d rising is beneficial to the ion beam focusing from over focusing. Focusing degree increases and extraction beam intensity drops with b/D increasing. Focusing degree rises with B/d decreasing and the rising tendency slows down when B/d is smaller than 4. The suitable ranges of D/d, b/D and B/d are respectively 1.6—2.1,0.7—1.1 and 4—7 when considering comprehensively the focusing degree, the extraction beam intensity and the pressure. Change of extraction voltage and oscillator power has opposite effect on the ion source performance and they have respectively best operation values.

References

[1]

. SUN Zhen-Wu, LI Yu-Xiao, JIANG Sheng-Nan et al. HighPower Laser and Particle Beams, 2005, 17(7): 1117-1120(in Chinese)(孙振武，李玉晓，姜胜南等.强激光与粒子束，2005, 17(7):1117-1120)2. YE Ming-Han, CHEN Jian-Pu. Electrostatic Accelerator.Beijing: Science Press, 1965. 266-275(in Chinese)(叶铭汉，陈监璞.静电加速器.北京:科学出版社,1965.266-275)3. SUN Zhen-Wu, ZHENG Shi-Quan, LI Tao et al. Journal ofSichuan University (Natural Science Edition), 2005, 42(5):974-977(in Chinese)(孙振武，郑世全，李涛等.四川大学学报(自然科学版)，200542(5): 974-977)4. Langbein C. Nucl. Instrum. Methods, 1989, 278(1): 228-2325. Arzt T. J Phys., 1988, D21(2): 278-2856. LU Chao, YU Zeng-Liang, ZHAN Fu-Ru. Vacuum Scienceand Technology, 2002, 22(3): 173-177(in Chinese)(卢超，余增亮，詹福如.真空科学与技术，2002, 22(3): 173-177)7. Bandyopadhyay M, Tanga A, Falter H D et al. J Appl.Phys., 2004, 96: 4107-41138. Wutte D, Freedman S, Gough R et al. Nucl. Instrum. Meth-ods, 1998, B142(3): 409-416

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SUN Zhen-Wu, HUO Yu-Ping, LI Yu-Xiao and LI Tao. Study of Extraction Property of RF Ion Source[J]. Chinese Physics C, 2006, 30(9): 902-906.

SUN Zhen-Wu, HUO Yu-Ping, LI Yu-Xiao and LI Tao. Study of Extraction Property of RF Ion Source[J]. Chinese Physics C, 2006, 30(9): 902-906. shu

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Received: 2006-01-24
Revised: 2006-03-27

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沈阳化工大学材料科学与工程学院沈阳 110142

Study of Extraction Property of RF Ion Source

Corresponding author: SUN Zhen-Wu,

School of Physics Engineering, Zhengzhou University, Zhengzhou 450052, China

Received Date: 2006-01-24
Accepted Date: 2006-03-27
Available Online: 2006-09-05

Abstract: Effects of geometry parameters of extraction electrode, extraction voltage and oscillator power on the extraction property of RF ion source are measured and the experimental results are analyzed. It turns out that the RF ion source has a good extraction property. There is the best D/d on condition that other parameters don't change. The D/d rising is beneficial to the ion beam focusing from over focusing. Focusing degree increases and extraction beam intensity drops with b/D increasing. Focusing degree rises with B/d decreasing and the rising tendency slows down when B/d is smaller than 4. The suitable ranges of D/d, b/D and B/d are respectively 1.6—2.1,0.7—1.1 and 4—7 when considering comprehensively the focusing degree, the extraction beam intensity and the pressure. Change of extraction voltage and oscillator power has opposite effect on the ion source performance and they have respectively best operation values.