Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source

E.Galutschek<SUP>1</SUP>; E.Salzborn<SUP>2</SUP>; F.Aumayr<SUP>1</SUP>; HP.Winter<SUP>1</SUP>

Chinese Physics C> 2007, Vol. 31> Issue(S1) : 66-69

Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source

Institut fur Allgemeine Physik, Vienna University of Technology, Vienna 1040, Austria2 Institut fur Atom- und Molekulphysik, Justus-Liebig University, Giessen 35390, Germany

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Abstract：
A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed, with the plasma-confining magnetic field produced exclusively by permanent magnets. Microwave power of up to 175W in the frequency range from 12.75 to 14.5GHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner. The waveguide coupling system serves also as biased electrode, and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas-mixing mode. A triode extraction system sustains ion acceleration voltages between 1kV and 10kV. The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.

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E.Galutschek¹, E.Salzborn², F.Aumayr¹ and HP.Winter¹. Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source[J]. Chinese Physics C, 2007, 31(S1): 66-69.

E.Galutschek¹, E.Salzborn², F.Aumayr¹ and HP.Winter¹. Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source[J]. Chinese Physics C, 2007, 31(S1): 66-69. shu

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Received: 2007-05-30
Revised: 1900-01-01

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1.
沈阳化工大学材料科学与工程学院沈阳 110142

Compact, Low-cost, 14.5 GHz All-permanent Magnet Field ECR Ion Source

Institut fur Allgemeine Physik, Vienna University of Technology, Vienna 1040, Austria2 Institut fur Atom- und Molekulphysik, Justus-Liebig University, Giessen 35390, Germany

Received Date: 2007-05-30
Accepted Date: 1900-01-01
Available Online: 2007-01-03

Abstract: A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed, with the plasma-confining magnetic field produced exclusively by permanent magnets. Microwave power of up to 175W in the frequency range from 12.75 to 14.5GHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner. The waveguide coupling system serves also as biased electrode, and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas-mixing mode. A triode extraction system sustains ion acceleration voltages between 1kV and 10kV. The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.