Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Wang Jun; Cui Mingqi; Xu Wenxuan; Huang Yuying; Wang Dewu; Liu Jianfei; Xian Dingchang

Chinese Physics C> 1994, Vol. 18> Issue(1) : 13-19

Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Institute of High Energy Physics,Beijing 100039

Abstract
HTML
Reference
Related

PDF

Abstract：
W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.

References

[1]

F.Schaeferset al,Proc.SPIE,984（1988）23.[2]A.Khandaret al,Proc.SPIE,688（1986）176.[3]崔明启等，全国薄膜学术讨论会（TFC'91）论文集，（1991）248.[4]R.W.JAMes,”The Optical Principles of the Diffraction of X-RAy“（Cornell University,Ithaca.New York,1965）P168.[5]R.W.James,Solid State Physics.15（1963）63.[6]T.W.Barbee,Jr.,AIP Conf.Proc,75（1981）131.[7]J.WAng,M.Q.Cui,Y.Y.Huang,D.XiAn Proceedings of Symposium on Engineering Optics SJSEO'92Beijing.

Access

Get Citation

Wang Jun, Cui Mingqi, Xu Wenxuan, Huang Yuying, Wang Dewu, Liu Jianfei and Xian Dingchang. Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method[J]. Chinese Physics C, 1994, 18(1): 13-19.

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 1900-01-01
Revised: 1900-01-01

Article Metric

Article Views(3524)
PDF Downloads(636)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Study on Structure of Multilayers by Synchrotron Radiation Small Angle Diffraction Method

Corresponding author: Wang Jun,

Institute of High Energy Physics,Beijing 100039

Received Date: 1900-01-01
Accepted Date: 1900-01-01
Available Online: 1994-01-05

Abstract: W/Si and Nb/Si multilayers were fabricated by magnetron sputtering technique and measured by small angle diffraction at the diffraction station of Beijing Synchrotron Radiation Facility (BSRF). The periodicity and composition of the multilayer were analysed. The simulation and experiment results were compared.