Grazing Exit X-Ray Fluorescence Spectroscopy

XU Qing; WEI Xiang-Jun; HUANG Yu-Ying; HE Wei

Chinese Physics C> 2005, Vol. 29> Issue(S1) : 80-83

Grazing Exit X-Ray Fluorescence Spectroscopy

Institute of High Energy Physics, CAS, Beijing 100049, China2 Institute of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China

Abstract
HTML
Reference
Related

PDF

Abstract：
In this paper, A grazing exit X-ray fluorescence spectroscopy for thin film analysis was developed by Institute of High Energy Physics, Chinese Academy of Sciences. GEXRF is a new method of instrumental analysis that not only allows determination of the film composition, but also provides information on depth distributions and densities, thickness of films. With grazing-emission X-ray fluorescence, the opposite principle of total reflection X-ray fluorescence is utilized. In this study, X-ray fluorescence (XRF) experiments have been performed for metal thin films (Ni, Ni/Ti) on silicon substrates and a mirror-polished GaAs under the grazing exit condition. The XRF intensity was measured as a function of the exit angle for nearly normal X-ray incidence. The angular dependence of the grazing exit XRF intensity showed a sharp increase at the critical angle of K_α, K_β radiation for the metal film. The applicability of the grazing exit XRF for thin-film analysis was clearly demonstrated.

References

[1]

. Rink I, Thewissen H. Spectrochim. Acta, 1999, B54: 14272. Soo Y L, Huang S, Kao Y H et al. Appl. Phys. Lett., 2000,76(25): 7293. Huh B K, Kim J S, Shin N S et al. Spectrochim. Acta,2003, B58: 14454. Klocckenkmper R, Becker H W, Bubert H et al. Spectrochim.Acta, 2002, B57: 15935. Becker R S, Golovchenko J A, Pater J R. Phys. Rev. Lett.,1983, 50(3): 1536. de Bokx P K, Kok Chr et al. Spectrochim. Acta, 1997,B52: 8297. Noma T, Miyata H, Ino S. J. Appl. Phys., 1992, 31: L9008. Tsuji K, Delalieux F. Spectrochim. Acta, 2003, B58: 22339. Emoto T, Sato Y, Konishi Y et al. Spectrochim. Acta, 2004,B59: 129110. Monaghan M L, Nigam T, Houssa M. Thin Solid Films,2000, 359(2): 19711. Tsuji K, Injuk J, Van Grieken R. X-Ray Spectrometry: Recent Technological Advance. England: John Wiley Sons,2004. 294

[1]	ZHANG Zheng-Jun , HAN Yin-Lu , SHEN Qing-Biao , CAI Chong-Hai . Studies on Energy Spectra of Outgoing Particles in (p,Pb),(p,Bi),(p,Hg) Reactions in Energy Range up to 250MeV. Chinese Physics C, 2007, 31(5): 464-469.
[2]	HAO Hu-Lin , FENG Ying , HUANG Yu-Ying , TIAN Sheng-Ke , LU Ling-Li , YANG Xiao-E , WEI You-Zhang . In Situ Analysis of Cellular Distribution of Iron and Zinc in Rice Grain Using SRXRF Method. Chinese Physics C, 2005, 29(S1): 56-60.
[3]	GONG Yan , CHEN Bo , NI Qi-Liang , CUI Ming-Qi , ZHAO Yi-Dong , WU Zhong-Hua . Thickness Analysis for Thin-Film by Glazing Exit X-ray Fluorescence With Synchrotron Radiation Source. Chinese Physics C, 2005, 29(11): 1104-1106.
[4]	YU Fu-Sheng , YUAN Wan-Ming , HAN Song , JIN Ke , HUANG Yu-Ying , HE Wei , DONG Jin-Quan , JIA Xiu-Qin , CAO Jie , WANG Hong-Yue . Measurements of Trace Elements in Melt Inclusions by Synchrotron Radiation X-Ray Fluorescence Microprobe Techniques. Chinese Physics C, 2004, 28(6): 675-678.
[5]	FENG Gun-Feng , ZHANG Xue-Yao , WANG Yong-Gang , XUE Liang , MA Li-Na , LI Jin-Yu , ZHANG Nai-Jian . Identification of Primary Y-Rays by the Characteristics of Time-Space Structure of the Cosmic-Ray Air Showers. Chinese Physics C, 2003, 27(11): 969-972.
[6]	XIE Hong-Lan , CHEN Jian-Wen , GAO Hong-Yi , LI Ru-Xin , XU Zhi-Zhan . Influence of Angle Range of Recording A Hologram to the Reconstructed Atomic Image in X-ray Fluorescence Holography. Chinese Physics C, 2003, 27(S1): 86-91.
[7]	TANG Yun-Hui , YUAN Wan-Ming , HAN Chun-Ming , HUANG Yu-Ying , HE Wei . SRXRF analysis on muscovite in Yuerya gold deposit, Eastern Hebei, China. Chinese Physics C, 2003, 27(S1): 109-113.
[8]	KANG Shi-Xiu , SUN Xia , YAO Kun , WU Zi-Qin , HUANG Yu-Ying , JU Xin , XIAN Ding-Chang . Measurement and Calculation of Escape Peak in SR-XRF Analysis. Chinese Physics C, 2001, 25(S1): 39-43.
[9]	JU Xin , SHEN Xian-Sheng , KANG Shi-Xiu , WU Zi-Qin , SUN Li-Guang , ZHANG Li , YIN Xue-Bin , HUANG Yu-Ying . X-Ray Fluorescence Analysis of Some Plants in the King George Island,Antarctica. Chinese Physics C, 2001, 25(S1): 44-48.
[10]	Zhao Limin , Wu Yingrong , Huang Yuying , Li Guangcheng , Jia Quanjie , Yuan Lizhen , Chen Jiapen . Application of Total Reflection X-ray Fluorescence Analysis in Bionmedical Field. Chinese Physics C, 1998, 22(2): 186-191.
[11]	Wu Yingrong , Chao Zhiyu , Pan Juxiang , Hong Rong , Xiao Yanan , Li Guangcheng , Huang Yuying , Zhao Limin . Microprobe X-Ray Fluoresceoce Experintental Station of Beijing Syochrotron Radiation Facility. Chinese Physics C, 1997, 21(5): 475-480.
[12]	Tang Guoyou , Bai Xinhua , Shi Zhaomin , Chen Jinxiang . Measurement of Angular Distribution and Cross Section For ⁵⁸Ni(n,α) ⁵⁵Fe Reaction at 5.1 MeV. Chinese Physics C, 1995, 19(3): 223-228.
[13]	KONG Xiang-Jing , LI Pan-Lin . About Three-Body Exit Channel in the Reaction ¹²C+¹⁶O at E_L(¹⁶O)=56MeV. Chinese Physics C, 1991, 15(8): 748-753.
[14]	WANG Zheng-Da . A STUDY OF EXITATION ENERGIES SHARING BETWEEN FRAGMENTS IN HEAVY-ION REACTIONS. Chinese Physics C, 1990, 14(11): 1051-1056.
[15]	WANG Gao-Sheng , WANG Qi , ZHU Yong-Tai , WU Guo-Hua , WANG Xiao-Ming , LI Song-Lin , HU Xiao-Qing , YIN Xu , XU Hu-Shan , FAN Guo-Ying , FENG En-Pu , SONG Shi-Zhan , WU Zhong-Li , YIN Shu-Zhi , ZHANG Zhen . THE MEASUREMENT AND THEORETICAL ANALYSIS OF INCLUSIVE α-PARTICLE EMISSION IN 97MeV ¹⁶O+⁵¹V REACTION. Chinese Physics C, 1990, 14(3): 253-257.
[16]	MIAO Rong-Zhi . A STUDY OF PRE-EQUILIBRIUM EMISSION INVOLVING COMPLEX PROJECTILE AND EMITTED PARTICLE IN MEMORY MODEL. Chinese Physics C, 1989, 13(11): 1039-1048.
[17]	WU Guo-Hua , MIAO Rong-Zhi , GE Ling-Xiao , LIU Jian-Ye . THE ENERGY DEPENDENCE OF THE CONDENSATION PROBABILITY IN THE COMPLEX PARTICLE EMISSION PROBABILITY. Chinese Physics C, 1987, 11(3): 403-408.
[18]	WANG Da-Yan , JIN Gen-Ming , ZHANG Li , YUE Hai-Kui , WANG Xi-Ming . INFLUENCE OF THE NEUTRON NUMBER OF TARGET NUCLEUS ON CROSS SECTIONS OF PARTICLES EMISSION IN ¹²C+^112,124Sn. Chinese Physics C, 1986, 10(1): 68-74.
[19]	MIAO Rong-Zhi , WU Guo-Hua , ZHENG Wei-Han , LIU Jian-Ye , YU Chao-Fan , YU Xie . A MODIFICATION FOR COMPLEX-PARTICLE EMISSION PROBABILITY IN THE PRE-EQUILIBRIUM EXCITON MODEL. Chinese Physics C, 1985, 9(1): 95-100.
[20]	SHEN Wen-Qing , YIN Shu-Lan , GUO Zhong-Yan , ZHAN Wen-Long , ZHU Yong-Tai , JIN Gen-Ming , QIAO Wei-Min , WU En-Jiu , JIANG Cheng-Lie . MEASURMENT OF PROJECTILE-LIKE FRAGMENTS PRODUCED BY 80.6MeV¹⁶O ON ²⁷Al. Chinese Physics C, 1985, 9(3): 332-340.

Access

Get Citation

XU Qing, WEI Xiang-Jun, HUANG Yu-Ying and HE Wei. Grazing Exit X-Ray Fluorescence Spectroscopy[J]. Chinese Physics C, 2005, 29(S1): 80-83.

XU Qing, WEI Xiang-Jun, HUANG Yu-Ying and HE Wei. Grazing Exit X-Ray Fluorescence Spectroscopy[J]. Chinese Physics C, 2005, 29(S1): 80-83. shu

RIS(for EndNote,Reference Manager,ProCite)

BibTex

Txt

Milestone

Received: 2005-10-28
Revised: 1900-01-01

Article Metric

Article Views(3025)
PDF Downloads(622)
Cited by(0)

Policy on re-use

To reuse of subscription content published by CPC, the users need to request permission from CPC, unless the content was published under an Open Access license which automatically permits that type of reuse.

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Grazing Exit X-Ray Fluorescence Spectroscopy

Corresponding author: XU Qing,

Institute of High Energy Physics, CAS, Beijing 100049, China2 Institute of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China

Received Date: 2005-10-28

Accepted Date: 1900-01-01

Available Online: 2005-01-02

Abstract: In this paper, A grazing exit X-ray fluorescence spectroscopy for thin film analysis was developed by Institute of High Energy Physics, Chinese Academy of Sciences. GEXRF is a new method of instrumental analysis that not only allows determination of the film composition, but also provides information on depth distributions and densities, thickness of films. With grazing-emission X-ray fluorescence, the opposite principle of total reflection X-ray fluorescence is utilized. In this study, X-ray fluorescence (XRF) experiments have been performed for metal thin films (Ni, Ni/Ti) on silicon substrates and a mirror-polished GaAs under the grazing exit condition. The XRF intensity was measured as a function of the exit angle for nearly normal X-ray incidence. The angular dependence of the grazing exit XRF intensity showed a sharp increase at the critical angle of K_α, K_β radiation for the metal film. The applicability of the grazing exit XRF for thin-film analysis was clearly demonstrated.

HTML

Reference (1)

Grazing Exit X-Ray Fluorescence Spectroscopy

Abstract：

References

Access

Article Metrics

Metrics

通讯作者: 陈斌, bchen63@163.com

Email This Article